6/9/2011	10:49:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/9/2011	10:49:04 AM	Recipe started at 10:49 AM
6/9/2011	10:49:04 AM	H2 valve closed
6/9/2011	10:49:04 AM	BCl3 valve closed
6/9/2011	10:49:04 AM	PH3 valve closed
6/9/2011	10:49:04 AM	SiCl4 pre valve closed
6/9/2011	10:49:04 AM	SiCl4 post valve closed
6/9/2011	10:49:04 AM	Main Vac valve closed
6/9/2011	10:49:04 AM	Bypass valve closed
6/9/2011	10:49:04 AM	Bubbler valve closed
6/9/2011	10:49:04 AM	Helium valve opened
6/9/2011	10:49:04 AM	Helium MFC set to  500.000000
6/9/2011	10:49:04 AM	H2 MFC set to  0.000000
6/9/2011	10:49:04 AM	BCl3 MFC set to  0.000000
6/9/2011	10:49:04 AM	PHl3 MFC set to  0.000000
6/9/2011	10:49:04 AM	SiCl4 MFC set to  0.000000
6/9/2011	10:49:04 AM	Bypass solenoid MFC set to  0.000000
6/9/2011	10:49:05 AM	Tube furnace set to 0
6/9/2011	10:50:25 AM	Helium valve closed
6/9/2011	10:50:25 AM	H2 valve closed
6/9/2011	10:50:25 AM	BCl3 valve closed
6/9/2011	10:50:25 AM	PH3 valve closed
6/9/2011	10:50:25 AM	SiCl4 pre valve closed
6/9/2011	10:50:25 AM	SiCl4 post valve closed
6/9/2011	10:50:25 AM	Main Vac valve closed
6/9/2011	10:50:25 AM	Bypass valve closed
6/9/2011	10:50:25 AM	Bubbler valve closed
6/9/2011	10:50:25 AM	Helium MFC set to  0.000000
6/9/2011	10:50:25 AM	H2 MFC set to  0.000000
6/9/2011	10:50:25 AM	BCl3 MFC set to  0.000000
6/9/2011	10:50:25 AM	PHl3 MFC set to  0.000000
6/9/2011	10:50:25 AM	SiCl4 MFC set to  0.000000
6/9/2011	10:50:25 AM	Bypass solenoid MFC set to  0.000000
6/9/2011	10:50:26 AM	Tube furnace set to 0
6/9/2011	10:50:26 AM	Run finished at 10:50 AM
6/9/2011	10:50:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/9/2011	10:54:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2011	10:54:38 AM	Recipe started at 10:54 AM
6/9/2011	10:54:38 AM	Helium valve closed
6/9/2011	10:54:38 AM	H2 valve closed
6/9/2011	10:54:38 AM	BCl3 valve closed
6/9/2011	10:54:38 AM	PH3 valve closed
6/9/2011	10:54:38 AM	SiCl4 pre valve closed
6/9/2011	10:54:38 AM	SiCl4 post valve closed
6/9/2011	10:54:38 AM	Main Vac valve closed
6/9/2011	10:54:38 AM	Bubbler valve closed
6/9/2011	10:54:38 AM	Bypass valve opened
6/9/2011	10:54:38 AM	Helium MFC set to  0.000000
6/9/2011	10:54:38 AM	H2 MFC set to  0.000000
6/9/2011	10:54:38 AM	BCl3 MFC set to  0.000000
6/9/2011	10:54:38 AM	PHl3 MFC set to  0.000000
6/9/2011	10:54:38 AM	SiCl4 MFC set to  0.000000
6/9/2011	10:54:38 AM	Bypass solenoid MFC set to  0.000000
6/9/2011	10:54:38 AM	Tube furnace set to 0
6/9/2011	10:55:10 AM	Helium valve closed
6/9/2011	10:55:10 AM	H2 valve closed
6/9/2011	10:55:10 AM	BCl3 valve closed
6/9/2011	10:55:10 AM	PH3 valve closed
6/9/2011	10:55:10 AM	SiCl4 pre valve closed
6/9/2011	10:55:10 AM	SiCl4 post valve closed
6/9/2011	10:55:10 AM	Bubbler valve closed
6/9/2011	10:55:10 AM	Main Vac valve opened
6/9/2011	10:55:10 AM	Bypass valve opened
6/9/2011	10:55:10 AM	Helium MFC set to  0.000000
6/9/2011	10:55:10 AM	H2 MFC set to  0.000000
6/9/2011	10:55:10 AM	BCl3 MFC set to  0.000000
6/9/2011	10:55:10 AM	PHl3 MFC set to  0.000000
6/9/2011	10:55:10 AM	SiCl4 MFC set to  0.000000
6/9/2011	10:55:10 AM	Bypass solenoid MFC set to  0.000000
6/9/2011	10:55:10 AM	Tube furnace set to 0
6/9/2011	10:55:10 AM	Run finished at 10:55 AM
6/9/2011	10:55:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
